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Influence of Nano-Crystal Silicon Thin Film and Thin Film Transistor Under Neutral Beam Assisted Hydrogen Plasma Treatment
- Authors
- Hong MunPyo
- Issue Date
- 28-8월-2013
- Publisher
- CeSTA (Center for Surface Technology and Applications)
- Citation
- AEPSE 2013 (9th Asian-European International Conference On Plasma Surface Engineering)
- Conference Name
- AEPSE 2013 (9th Asian-European International Conference On Plasma Surface Engineering)
- Place
- KO
- Conference Date
- 2013-08-25
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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