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Fabrication of suspended bridge type resonator using laser interference lithographyFabrication of suspended bridge type resonator using laser interference lithography
- Alternative Title
- Fabrication of suspended bridge type resonator using laser interference lithography
- Authors
- Rieh, Jae-Sung
- Issue Date
- 29-10월-2012
- Publisher
- IEEE
- Citation
- European Microwoave Integrated Circutis Conference (EuMIC)
- Conference Name
- European Microwoave Integrated Circutis Conference (EuMIC)
- Place
- NE
- Conference Date
- 2012-10-29
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Collections - College of Engineering > School of Electrical Engineering > 2. Conference Papers
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