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Beyond the Current Horizontal of Silicon Thin Film Technology: Light-Soaking Free Nano-Crystal Embedded Polymorphous Silicon Thin Film and TFT by Neutral Beam Assisted CVD at Room Temperature

Authors
Hong MunPyo
Issue Date
9-10월-2012
Publisher
the Eletrochemical Society of Japan
Citation
PRiME 2012
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/45488
Conference Name
PRiME 2012
Place
US
327,Level3, Hawaii Convention Center
Conference Date
2012-10-07
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Graduate School > Department of Applied Physics > 2. Conference Papers

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