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Effect of fluorine ions on wet etching behavior of copper/molybdenum in acidic solutions
- Authors
- Hong MunPyo
- Issue Date
- 6-7월-2012
- Publisher
- ICMAP 2012 (The 4th International Conference on Microelectronics and Plasma Technology)
- Citation
- ICMAP 2012 (The 4th International Conference on Microelectronics and Plasma Technology)
- Conference Name
- ICMAP 2012 (The 4th International Conference on Microelectronics and Plasma Technology)
- Place
- KO
- Conference Date
- 2012-07-04
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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