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New approaches for highly doped polymorphous silicon thin film with homogeneously embedded nano-crystalline by using neutral beam assisted chemical vapor deposition system at near room temperature
- Authors
- Hong MunPyo
- Issue Date
- 31-1월-2012
- Publisher
- FCT, i3N
- Citation
- ITC 2012 ？ 8th International Thin-Film Transistor Conference
- Conference Name
- ITC 2012 ？ 8th International Thin-Film Transistor Conference
- Place
- PO
Lisbon, Portugal
- Conference Date
- 2012-01-30
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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