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두께 및 상에 따른 Ge2Sb2Te5 박막의 열전도도 변화 및 Ge2Sb2Te5 - TiN박막간 계면열저항 계측Thickness and phase dependence of the thermal conductivity of Ge2Sb2Te5 and the thermal boundary resistance between Ge2Sb2Te5 and TiN
- Alternative Title
- Thickness and phase dependence of the thermal conductivity of Ge2Sb2Te5 and the thermal boundary resistance between Ge2Sb2Te5 and TiN
- Authors
- KWON, Oh Myoung
- Keywords
- Phase change memory(상변화메모리), Film thermal conductivity(박막 열전도도) Thermal boundary resistance(계면열저항)
- Issue Date
- 6-11월-2009
- Publisher
- 대한기계학회
- Citation
- 대한 기계학회 추계학술대회
- Conference Name
- 대한 기계학회 추계학술대회
- Place
- KO
강원도 용평 리조트
- Conference Date
- 2009-11-04
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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