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Exact locating of sub-surface microelectronic structures using scanning thermal-wave microscopy
- Authors
- KWON, Oh Myoung
- Issue Date
- 10-12월-2008
- Publisher
- SPIE
- Citation
- SPIE Smart Materials, Nano+Micro-Smart Systems
- Conference Name
- SPIE Smart Materials, Nano+Micro-Smart Systems
- Place
- AT
melbourne, austrailia
- Conference Date
- 2008-12-09
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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