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Etching Characteristics and Mechanism of VO2 in inductively coupled plasma
- Authors
- Hong MunPyo
- Issue Date
- 24-Jun-2008
- Conference Name
- Proceeding on the 4th Asia Pacific Conference on Transducers and Micro/Nano Technology
- Place
- 대만
tainan, Taiwan
- Conference Date
- 2008-06-22 ~ 2008-06-25
- Conference Name
- The 4th Asia Pacific Conference on Transducers and Micro/Nano Technology
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- There are no files associated with this item.
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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Related Researcher
- Hong, Mun Pyo
- Graduate School (Department of Applied Physics)