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Chromium/Nickel-Doped Silicon Oxide Thin-Film Electrode: Mechanism and Application to Microscale Light-Emitting Diodes

Authors
Son, Kyung RockLee, Byeong RyongKim, Tae Geun
Issue Date
5-Dec-2018
Publisher
AMER CHEMICAL SOC
Keywords
microscale light-emitting diodes; electrical doping treatment; silicon oxide; transmittance; hole injection; Schottky barrier height
Citation
ACS APPLIED MATERIALS & INTERFACES, v.10, no.48, pp.40967 - 40972
Indexed
SCIE
SCOPUS
Journal Title
ACS APPLIED MATERIALS & INTERFACES
Volume
10
Number
48
Start Page
40967
End Page
40972
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/71238
DOI
10.1021/acsami.8b15364
ISSN
1944-8244
Abstract
Light extraction of microscale light-emitting diodes (mu LEDs) is fundamentally limited by p-type metal electrodes for current injection due to the small pixel size of the LEDs. We propose Cr/Ni-doped silicon oxide (CN-SiOX) films as p-type contact electrodes for blue mu LEDs to increase the light-output power under the same emitting areas. The conductivity of CN-SiOX electrode originates from the diffusion of top Cr/Ni atoms via electric-field-induced doping treatments, which allows for effective hole injection into the active layer. Consequently, we achieved a 62% improvement in the current density and a 47% increase in the light-output power compared to ITO-based mu LEDs.
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