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The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process

Authors
Kwon, Kwang-Ho
Publisher
ICMAP 2008
Citation
1st International Conference on Microelectronics and plasma Technology
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/75779
Conference Name
1st International Conference on Microelectronics and plasma Technology
Place
KO
서울
Conference Date
2008-08-18
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Graduate School > Department of Control and Instrumentation Engineering > 2. Conference Papers

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