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Etching Mechanism of ZnO films using Inductively Coupled HBr/Ar Plasma

Authors
Kwon, Kwang-Ho
Publisher
DPS 2008
Citation
30th International Symposium on Dry Process
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/76461
Conference Name
30th International Symposium on Dry Process
Place
JA
Conference Date
2008-11-26
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Graduate School > Department of Control and Instrumentation Engineering > 2. Conference Papers

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