Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Etching Mechanism of ZnO films using Inductively Coupled HBr/Ar Plasma
- Authors
- Kwon, Kwang-Ho
- Place
- 대한민국
- Conference Date
- 2008-08-18 ~ 2008-08-20
- Conference Name
- 1st International Conference on Microelectronics and plasma Technology
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Kwon, Kwang Ho
- Department of Control and Instrumentation Engineering