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Channel width dependence of electrical characteristics of a-Si:H TFTs under bending stresses

Authors
Oh, HyungonCho, KyoungahKim, Sangsig
Issue Date
Apr-2017
Publisher
IOP PUBLISHING LTD
Keywords
bending stress; channel width; a-Si:H TFT; bendable TFT
Citation
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, v.32, no.4
Indexed
SCIE
SCOPUS
Journal Title
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume
32
Number
4
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/83998
DOI
10.1088/1361-6641/aa59a3
ISSN
0268-1242
Abstract
In this study, we investigate the electrical characteristics of bendable a-Si:H thin-film transistors (TFTs) with various channel widths as a function of bending stress. Compared with a narrower channel TFT, a wider channel TFT exhibits a stable performance even at a bending strain of 1.3%. Our stress and strain distribution analysis reveals an inverse relationship between the channel width and the channel stress. As the channel width widens from 8 to 50 mu m, the stress experienced by the middle channel region decreases from 545 to 277 MPa. Moreover, a 50 mu m-channel-width TFT operates stably even after a 15 000 bending cycle while the 8 mu m-channel-width TFT fails to operate after a 2000 bending cycle.
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