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Influence of thermal stress on heat-generating performance of indium tin oxide nanoparticle thin films

Authors
Yang, KyungwhanCho, KyoungahKim, SangsigIm, Kiju
Issue Date
11월-2016
Publisher
A V S AMER INST PHYSICS
Citation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.34, no.6
Indexed
SCIE
SCOPUS
Journal Title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume
34
Number
6
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/86917
DOI
10.1116/1.4963832
ISSN
1071-1023
Abstract
In this study, the authors investigate the influence of thermal stress on the heat-generating performance of indium tin oxide (ITO) nanoparticle (NP) thin films on quartz substrates. ITO NP thin films experience repeated thermal stresses during their electrical heating cycles. As the number of the heating cycles increases to 50, the highest temperature of the ITO NP thin film decreases from 317 to 221 degrees C. Our analysis of the temperature profiles, morphological images, and electrical resistance reveals that the degradation in the heat-generating performance is closely correlated with microcracks in the oxide thin film caused by thermal stresses. (C) 2016 American Vacuum Society.
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공과대학 (전기전자공학부)
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