Forming-free resistive switching characteristics and improved reliability in sub-stoichiometric NbNx films
- Authors
- Kim, Hee-Dong; Yun, Min Ju; Kim, Tae Geun
- Issue Date
- 4월-2015
- Publisher
- WILEY-V C H VERLAG GMBH
- Keywords
- niobium nitrides; thin films; resistive switching; resistive random access memories; stoichiometry
- Citation
- Physica Status Solidi-Rapid Research Letters, v.9, no.4, pp.264 - 268
- Indexed
- SCIE
SCOPUS
- Journal Title
- Physica Status Solidi-Rapid Research Letters
- Volume
- 9
- Number
- 4
- Start Page
- 264
- End Page
- 268
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/94046
- DOI
- 10.1002/pssr.201510022
- ISSN
- 1862-6254
- Abstract
- In this study, we demonstrate forming-free and reliable resistive switching (RS) characteristics by controlling the stoichiometry of niobium nitride (NbNx) films. Compared to a perfect stoichiometric NbNx film, a decrease of 6% nitrogen content and an increase of 5% O-2 content are found in the sub-stoichiometric NbNx sample (s-NbNx), and a structural change for the s-NbNx film is observed from X-ray diffraction results, which results in the possibility of abundant defect generation in the s-NbNx film at virgin state. In the RS test, the s-NbNx film normally carries out well without initial forming because of the already-formed conducting filaments; in particular, in the reliability study, the s-NbNx film shows more stable dc cycling characteristics for 1000 cycles without any degradation and smaller variations in the operating current and voltage characteristics. (C) 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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