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Showing results 1 to 14 of 14

SCISCIESCOPUS
A Model-Based Analysis of Plasma Parameters and Composition in HBr/X (X=Ar, He, N-2) Inductively Coupled Plasmas

Kwon, Kwang-Ho; Efremov, Alexander; Kim, Moonkeun; Min, Nam Ki; Jeong, Jaehwa; Kim, Kwangsoo

ArticleIssue Date2010CitationJOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.157, no.5, pp H574 - H579PublisherELECTROCHEMICAL SOC INC
SCISCIESCOPUS
Design and Fabrication of a PZT Cantilever for Low Frequency Vibration Energy Harvesting

Kim, Moonkeun; Hwang, Beomseok; Min, Nam Ki; Jeong, Jaehwa; Kwon, Kwang-Ho; Park, Kang-Bak

ArticleIssue Date2011CitationJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.11, no.7, pp 6510 - 6513PublisherAMER SCIENTIFIC PUBLISHERS
SCISCIESCOPUS
Design and Fabrication of Vibration Based Energy Harvester Using Microelectromechanical System Piezoelectric Cantilever for Low Power Applications

Kim, Moonkeun; Lee, Sang-Kyun; Yang, Yil Suk; Jeong, Jaehwa; Min, Nam Ki; Kwon, Kwang-Ho

ArticleIssue Date2013CitationJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.13, no.12, pp 7932 - 7937PublisherAMER SCIENTIFIC PUBLISHERS
SCIESCOPUS
Design, fabrication, and experimental demonstration of a piezoelectric cantilever for a low resonant frequency microelectromechanical system vibration energy harvester

Kim, Moonkeun; Hwang, Beomseok; Ham, Yong-Hyun; Jeong, Jaehwa; Min, Nam Ki; Kwon, Kwang-Ho

ArticleIssue Date2012CitationJOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, v.11, no.3PublisherSPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
SCISCIESCOPUS
Effect of Gas Mixing Ratio on Etch Behavior of Y2O3 Thin Films in Cl-2/Ar and BCl3/Ar Inductively Coupled Plasmas

Kim, Moonkeun; Efremov, Alexander; Hong, MunPyo; Min, Nam Ki; Park, Hyung-Ho; Baek, Kyu-Ha; Kwon, Kwang-Ho

ArticleIssue Date2010CitationJAPANESE JOURNAL OF APPLIED PHYSICS, v.49, no.8PublisherIOP PUBLISHING LTD
SCISCIESCOPUS
Etch mechanism of In2O3 and SnO2 thin films in HBr-based inductively coupled plasmas

Kwon, Kwang-Ho; Efremov, Alexander; Kim, Moonkeun; Min, Nam Ki; Jeong, Jaehwa; Hong, MunPyo; Kim, Kwangsoo

ArticleIssue Date2010CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.28, no.2, pp 226 - 231PublisherA V S AMER INST PHYSICS
SCISCIESCOPUS
Etching Characteristics of In2O3 and SnO2 Thin Films in an Inductively Coupled HBr/Ar Plasma: Effects of Gas Mixing Ratio and Bias Power

Kwon, Kwang-Ho; Efremov, Alexander; Kim, Moonkeun; Min, Nam Ki; Jeong, Jaehwa; Kim, Kwangsoo

ArticleIssue Date2010CitationJAPANESE JOURNAL OF APPLIED PHYSICS, v.49, no.3PublisherJAPAN SOC APPLIED PHYSICS
SCISCIESCOPUS
Formation of Metal and Dielectric Liners Using a Solution Process for Deep Trench Capacitors

Ham, Yong-Hyun; Kim, Dong-Pyo; Baek, Kyu-Ha; Park, Kun-Sik; Kim, Moonkeun; Kwon, Kwang-Ho; Shin, Hong-Sik; Lee, Kijun; Do, Lee-Mi

ArticleIssue Date2012CitationJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.12, no.7, pp 5897 - 5901PublisherAMER SCIENTIFIC PUBLISHERS
SCISCIESCOPUS
HfO2 etching mechanism in inductively-coupled Cl-2/Ar plasma

Kim, Moonkeun; Efremov, Alexander; Lee, Hyun Woo; Park, Hyung-Ho; Hong, MunPyo; Min, Nam Ki; Kwon, Kwang-Ho

ArticleIssue Date2011CitationTHIN SOLID FILMS, v.519, no.20, pp 6708 - 6711PublisherELSEVIER SCIENCE SA
SCISCIESCOPUS
Metal/Dielectric Liner Formation by a Simple Solution Process for through Silicon via Interconnection

Ham, Yong-Hyun; Kim, Dong-Pyo; Baek, Kyu-Ha; Park, Kun-Sik; Kim, Moonkeun; Kwon, Kwang-Ho; Lee, Kijun; Do, Lee-Mi

ArticleIssue Date2012CitationELECTROCHEMICAL AND SOLID STATE LETTERS, v.15, no.5, pp H145 - H147PublisherELECTROCHEMICAL SOC INC
SCISCIESCOPUS
Micromachining of a Bimorph Pb(Zr,Ti)O-3 (PZT) Cantilever Using a Micro-Electromechanical Systems (MEMS) Process for Energy Harvesting Application

Kim, Moonkeun; Hwang, Beomseok; Jeong, Jaehwa; Min, Nam Ki; Kwon, Kwang-Ho

ArticleIssue Date2012CitationJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.12, no.7, pp 6011 - 6015PublisherAMER SCIENTIFIC PUBLISHERS
SCISCIESCOPUS
Modeling of an inductively-coupled Cl-2/Ar plasma using neural network

Kim, Moonkeun; Jang, Hanbyeol; Lee, Yong-Hwa; Kwon, Kwang-Ho; Park, Kang-Bak

ArticleIssue Date2012CitationTHIN SOLID FILMS, v.521, pp 38 - 41PublisherELSEVIER SCIENCE SA
SCISCIESCOPUS
Modeling of electron temperature and DC bias voltage in an inductively-coupled Cl-2/Ar plasma using neural network

Kim, Moonkeun; Jang, Hanbyeol; Lee, Yong-Hwa; Kwon, Kwang-Ho; Park, Kang-Bak

ArticleIssue Date2013CitationSURFACE & COATINGS TECHNOLOGY, v.231, pp 546 - 549PublisherELSEVIER SCIENCE SA
SCISCIESCOPUS
Vibration Energy Harvester with Sustainable Power Based on a Single-Crystal Piezoelectric Cantilever Array

Kim, Moonkeun; Lee, Sang-kyun; Ham, Yong-Hyun; Yang, Yil Suk; Kwon, Jong-Kee; Kwon, Kwang-Ho

ArticleIssue Date2012CitationJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.12, no.8, pp 6283 - 6286PublisherAMER SCIENTIFIC PUBLISHERS
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