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A Model-Based Analysis of Plasma Parameters and Composition in HBr/X (X=Ar, He, N-2) Inductively Coupled Plasmas
- Issue Date
- 2010
- Publisher
- ELECTROCHEMICAL SOC INC
- Keywords
- argon; electron impact dissociation; gas mixtures; helium; hydrogen compounds; Langmuir probes; nitrogen; plasma chemistry; plasma density; plasma simulation; reaction kinetics theory
- Citation
- JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.157, no.5, pp.H574 - H579
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- Volume
- 157
- Number
- 5
- Start Page
- H574
- End Page
- H579
- ISSN
- 0013-4651
- Abstract
- This work discusses the effect of gas mixing ratio on the HBr/X (X=Ar, He, or N-2) plasma parameters, steady-state densities, and fluxes of active species in the planar inductively coupled plasma reactor. The investigation combined plasma diagnostics by Langmuir probes and a global (zero-dimensional) plasma model with Maxwellian approximation for the electron energy distribution function. The dilution of HBr by Ar results in a maximum effect on the HBr electron impact dissociation kinetics and provides a favorable condition for an ion-assisted chemical reaction.
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